Plasma treatment device
AssigneeEdwards Limited
InventorMarilena Radoiu
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Abstract
A plasma abatement device comprises a gas chamber having a gas inlet for receiving a gas to be treated by the device and a gas outlet, at least part of the inner surface of the gas chamber being formed from, or coated with, an electrically conductive material that is resistant to corrosion during treatment of a gas containing a halocompound and water vapor.
Claims7
A microwave plasma abatement device comprising a microwave resonant cavity having a gas inlet and a gas outlet, and a waveguide for conveying microwave radiation to the resonant cavity, the resonant cavity having an inner surface comprising an electrically conductive material resistant to corrosion induced by chemical reaction between a gas containing a halocompound and water vapour,
- wherein said electrically conductive material comprises titanium.
Dependencies are inferred from the claim text.