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US 9,329,360 B2Granted
Actuator having two piezoelectric elements on a membrane
AssigneeSintef
InventorsThor Bakke, Ib-Rune Johansen, Andreas Vogl, Frode Tyholdt, Dag Thorstein Wang
Life of this patent
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Abstract
The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.
Claims10
An actuator unit comprising:
- a rigid element;
- a frame;
- a bendable membrane essentially surrounding the rigid element and coupling the rigid element to the frame;
- a first piezoelectric element mounted on the bendable membrane on a side of the bendable membrane corresponding to the frame;
- a second piezoelectric element mounted on the bendable membrane on a side of the bendable membrane corresponding to the rigid element;
- and
- responsive to a signal from a signal generator, the first piezoelectric element and the second piezoelectric element contracting in a radial direction to bend the bendable membrane and move the rigid element.
4 more elements
An actuator unit comprising:
- a disc-shaped mirror plate;
- a bendable membrane disposed around a circumference of the disc-shaped mirror plate on a top side and being coupled to a frame;
- a first piezoelectric element mounted on the bendable membrane on a side of the bendable membrane corresponding to the frame;
- a second piezoelectric element mounted on the bendable membrane on a side of the bendable membrane corresponding to the disc-shaped mirror plate;
- and
- responsive to a signal from a signal generator, the first piezoelectric element and the second piezoelectric element contracting in a radial direction to bend the bendable membrane and move the disc-shaped mirror plate.
3 more elements
Dependencies are inferred from the claim text.