Microvalve having improved air purging capability

A microvalve comprising:

• a base plate including a surface having an actuator cavity provided therein that includes a longitudinally extending first cavity portion having a first longitudinal end and a second longitudinal end opposite the first longitudinal end, the first longitudinal end defining a dead end region, a second cavity portion having a structure that can vent air from the microvalve, and a vent structure that extends from the dead end region of the first cavity portion to the second cavity portion;
• a cover plate including a surface having an actuator cavity provided therein that includes a longitudinally extending first cavity portion having a first longitudinal end and a second longitudinal end opposite the first longitudinal end, the first longitudinal end defining a dead end region, a second cavity portion having a structure that can vent air from the microvalve, and a vent structure that extends from the dead end region of the first cavity portion to the second cavity portion;
• and an intermediate plate having a first surface that abuts the surface of the base plate and a second surface that abuts the surface of the cover plate, the intermediate plate including a displaceable member that is disposed within the actuator cavities of both the base plate and the cover plate for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve.