X-ray inspection device

An X-ray inspection device that is used on a conveyance path for conveying a printed substrate in a predetermined substrate conveying direction, comprising:

• a substrate table configured to hold the printed substrate;
• an X-ray source configured to irradiate X-rays onto the printed substrate held on the substrate table;
• an X-ray camera unit facing the X-ray source across the substrate table, the X-ray camera unit includes an X-ray camera that captures an X-ray image of the printed substrate held on the substrate table, the X-ray camera unit enabling the X-ray camera to move along a plane relative to the X-ray source so as to execute an oblique view capturing taken by diagonally capturing an essential inspection area, upon irradiating X-rays at a predetermined elevation angle onto the substrate;
• a frame forming a main body of the substrate table, the frame having an opening to transmit X-rays;
• a pair of conveyor frames configured to clamp the printed substrate with respect to a substrate width direction which is orthogonal to the substrate conveying direction in a horizontal plane;
• a pair of substrate conveyors, each substrate conveyor being disposed on a respective pair of the conveyor frames, the pair of substrate conveyors forming a substrate conveying mechanism configured to convey a printed substrate supported by the pair of conveyor frames in the substrate conveying direction;
• a distance adjustment mechanism configured to drive the pair of conveyor frames so that each of the pair of conveyor frames approaches or departs from each other in the substrate width direction, thereby adjusting a width dimension for allowing a printed substrate to be conveyed by the substrate conveying mechanism;
• a movable frame being disposed on a lower surface of the frame;
• and
• a table driving mechanism including the movable frame, the table driving mechanism being configured to drive the substrate table via the movable frame in a horizontal direction that is orthogonal to the substrate conveying direction, wherein
• the distance adjustment mechanism is configured to drive the pair of conveyor frames such that the conveyor frames equally approach or depart from each other,
• the pair of conveyor frames is disposed on the frame symmetrically with respect to a center axis of the opening along the substrate conveying direction, and
• the movable frame has a frame structure of which a center is open similarly to the frame, and
• each of the pair of conveyor frames has a facing edge that the conveyor frame faces in the substrate width direction, and a bevel, which inclines such that a downstream side in an X-ray irradiation direction of the X-ray irradiation unit is wider, and is formed on the facing edge.