US 9,320,184 B2Granted

ESD protection structure and method for manufacturing the same

AssigneeMurata Manufacturing Co., Ltd.

InventorsKosuke Yamada, Takashi Noma, Jun Adachi

Life of this patent

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Abstract

An ESD protection device includes an alumina multilayer substrate, a hollow portion, a discharge electrode pair, discharge-assisting electrodes, and a vitreous substance. The hollow portion is disposed inside of the alumina multilayer substrate. The electrodes of the discharge electrode pair are disposed opposite to each other at an interface between the hollow portion and the alumina multilayer substrate. The discharge-assisting electrodes are disposed dispersedly between the opposite electrodes of the discharge electrode pair. The vitreous substance covers the discharge-assisting electrodes in the inside of the hollow portion. A trial discharge is executed so as to induce creepage discharge between the electrodes of the discharge electrode pair in advance.

Claims6

Dependent claims

A method for manufacturing an ESD protection structure including an insulating portion, a pair of discharge electrodes disposed at a distance from each other on a surface of the insulating portion, and discharge-assisting electrodes disposed dispersedly between the pair of discharge electrodes, the method comprising the steps of:

forming electrode layers defining the discharge electrode pair and insulating material-coated metal particles and/or semiconductor particles defining the discharge-assisting electrodes on the insulating portion;
firing the insulating portion including the electrode layers and the insulating material-coated metal particles and/or semiconductor particles to form the ESD protection structure;
forming a vitreous substance so as to surround the discharge-assisting electrodes during the firing step;
applying a voltage exceeding a discharge voltage between the pair of discharge electrodes after the firing step is executed;
and
forming a discharge crater in or on the vitreous substance by removing a portion of the vitreous substance.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/553,031Filed 25 Nov 2014 · continuation
Priority: JP 2010-20272210 Sep 2010
Published: US 2015/0079273 A119 Mar 2015
Granted: 19 Apr 2016
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H05K 9/0079
Shielding materials: electrostatic discharge protection, e.g. ESD treated surface for rapid dissipation of charges
H01T 4/12
Having a single gap or a plurality of gaps in parallel: hermetically sealed
H01T 21/00
Apparatus or processes specially adapted for the manufacture or maintenance of spark
H02H 9/04
Emergency protective circuit arrangements for limiting excess current or voltage without disconnection: responsive to excess voltage

Family

PCT/JP2011/070428Parent of this continuation · filed 8 Sep 2011
Application13/774,077Parent of this continuation · filed 22 Feb 2013
US 2015/0079273 A1Pre-grant publication · published 19 Mar 2015
US 2013/0163130 A1Published application
US 9,320,184 B2This patent

From the US filing history. Foreign family members aren’t listed.