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US 9,318,997 B2Granted
Resonator
AssigneeNXP B.V.
InventorsCasper van der Avoort, Andreas Bernardus Maria Jansman, Robert James Pascoe Lander
Life of this patent
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Abstract
A resonator has a main resonator body and a secondary resonator structure. The resonator body has a desired mode of vibration of the resonator alone, and a parasitic mode of vibration, wherein the parasitic mode comprises vibration of the resonator body and the secondary resonator structure as a composite body. In this way, unwanted vibrational modes are quenched by the second suspended body.
Claims15
A resonator comprising:
- a first resonator body;
- an actuation arrangement for driving the resonator into a main resonant mode, in which the first resonator body vibrates parallel to a first axis wherein the main resonant mode includes a set of nodal points along the first axis of the first resonator body;
- a detection arrangement for detecting the vibration in the first axis direction and generating an electrical output signal derived from the vibration;
- and
- a second resonator structure which is coupled to at least one of the nodal points on the first resonator body;
- wherein the first resonator body includes,
- the main resonant mode, wherein the first resonator body vibrates and wherein the second resonator structure located at the nodal point of the resonator minimally vibrates, and
- a parasitic mode of vibration, wherein the first resonator body and the second resonator structure vibrate together as a composite body;
- an anchor arrangement which provides a connection between the first resonator body and a fixed support;
- wherein the second resonator structure comprises the anchor arrangement;
- and
- wherein the anchor arrangement comprises electrode areas having etch holes, and a cavity area formed beneath the etch holes.
9 more elements
A resonator comprising:
- means for driving a first resonator body into a main resonant mode, in which the first the resonator body vibrates parallel to a first axis wherein the main resonant mode includes a set of nodal points along the first axis of the first resonator body;
- means for detecting the vibration in the first axis direction and generating an electrical output signal derived from the vibration;
- and
- a second resonator structure means which is coupled to at least one of the nodal points on the first resonator body;
- wherein the first resonator body includes,
- the main resonant mode, wherein the first resonator body vibrates and wherein the second resonator structure located at the nodal point of the resonator minimally vibrates, and
- a parasitic mode of vibration, wherein the first resonator body and the second resonator structure vibrate together as a composite body;
- an anchor arrangement which provides a connection between the first resonator body and a fixed support;
- wherein the second resonator structure comprises the anchor arrangement;
- and
- wherein the anchor arrangement comprises electrode areas having etch holes, and a cavity area formed beneath the etch holes.
8 more elements
A resonator comprising:
- a first resonator body;
- an actuation arrangement for driving the resonator into a main resonant mode, in which the first resonator body vibrates parallel to a first axis wherein the main resonant mode includes a set of nodal points along the first axis of the first resonator body;
- a detection arrangement for detecting the vibration in the first axis direction and generating an electrical output signal derived from the vibration;
- a second resonator structure which is coupled to at least one of the nodal points on the first resonator body;
- wherein the first resonator body includes,
- the main resonant mode, wherein the first resonator body vibrates and wherein the second resonator structure located at the nodal point of the resonator minimally vibrates, and
- a parasitic mode of vibration, wherein the first resonator body and the second resonator structure vibrate together as a composite body;
- and
- wherein the second resonator structure comprises a plurality of bodies which are mutually not coupled mechanically.
6 more elements
Dependencies are inferred from the claim text.