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US 9,318,864 B2Granted
Laser beam output control with optical shutter
AssigneeGigaphoton Inc.
InventorsKrzysztof Nowak, Osamu Wakabayashi, Hideo Hoshino
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Abstract
A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate; at least one amplifier disposed on a beam path of the pulsed laser beam; at least one optical shutter disposed on the beam path of the pulsed laser beam; and a controller configured to switch the at least one optical shutter.
Claims14
A laser apparatus, comprising:
- a master oscillator configured to output a pulsed laser beam continually at a repetition rate;
- a plurality of amplifiers disposed on a beam path of the pulsed laser beam;
- a plurality of optical shutters disposed on the beam path of the pulsed laser beam;
- and
- a controller configured to switch the plurality of optical shutters, wherein
- each of the plurality of optical shutters includes:
- an electro-optic device;
- a first optical filter disposed at an input side of the electro-optic device;
- a second optical filter disposed at an output side of the electro-optic device;
- and
- a power source coupled to the electro-optic device for applying voltage to the electro-optic device, and wherein
- the controller is configured to switch the plurality of optical shutters based on a signal inputted from an external apparatus while the master oscillator oscillates the pulsed laser beam, to perform a burst operation to repeatedly alternate a period for which the pulsed laser beam is outputted at the repetition rate and a period for which the pulsed laser beam is not outputted, and to control the plurality of optical shutters to open sequentially from an upstream side optical shutter to a downstream side optical shutter.
9 more elements
Dependencies are inferred from the claim text.