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US 9,318,704 B2Granted
Variable resistance memory device and methods of forming the same
AssigneeSamsung Electronics Co., Ltd.
InventorsDongjun Seong, Yoocheol Shin
Life of this patent
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Abstract
Variable resistance memory devices and methods of forming the same are disclosed. The devices may include an additional barrier layer that is a portion of a variable resistance layer and that is formed before forming a horizontal electrode layer. Due to the presence of the additional barrier layer, it may be possible to cure loss or damage of the variable resistance layer.
Claims3
A method of fabricating a variable resistance memory device, comprising:
- alternatingly stacking a plurality of sacrificial layers and a plurality of insulating layers on a layer;
- patterning the insulating layers and the sacrificial layers to form a vertical electrode hole;
- forming a first barrier layer on a sidewall of the vertical electrode hole;
- forming a switching layer on a sidewall of the first barrier layer;
- forming a vertical electrode in the vertical electrode hole, the vertical electrode being connected to the layer;
- patterning the insulating layers and the sacrificial layers to form a groove spaced apart from the vertical electrode hole;
- removing the sacrificial layers through the groove to form an empty space;
- conformally forming a second barrier layer in the empty space;
- and
- filling the empty space with a horizontal electrode layer.
7 more elements
Dependencies are inferred from the claim text.