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US 9,318,687 B2Granted
Piezoelectric element, piezoelectric device, ink-jet head, and ink-jet printer
AssigneeKonica Minolta, Inc.
InventorKenji Mawatari
Life of this patent
Estimating the term…
Abstract
A piezoelectric element having an electrode, a seed layer for controlling the crystal orientation of a piezoelectric layer, and the piezoelectric layer stacked in this order from the substrate side. The seed layer is composed of two or more layers stacked together each comprising crystals of spherical particles.
Claims17
A piezoelectric element comprising an electrode, a seed layer having a structure that controls crystal orientation of a piezoelectric layer, and the piezoelectric layer stacked in this order from a substrate side, wherein the seed layer comprises two or more layers stacked together each comprising spherical particles.
Dependencies are inferred from the claim text.