Methods and systems to reduce location-based variations in switching characteristics of 3D ReRAM arrays
AssigneeSanDisk 3D LLC
InventorsPankaj Kalra, Chandrasekhar Gorla, Masaaki Higashitani
Life of this patent
Estimating the term…
Loading patent…
AssigneeSanDisk 3D LLC
InventorsPankaj Kalra, Chandrasekhar Gorla, Masaaki Higashitani
Estimating the term…
Methods for reducing location-based variations in the switching characteristics of memory cells within a memory array are described. In some cases, the resistance of an embedded resistor within each memory cell may be set to reduce the overall variation in series resistances for the memory cells within a memory array. For example, embedded resistors associated with far-far bits may be set to a lower resistance than embedded resistors associated with near-near bits. An embedded resistor may comprise a layer of polysilicon within a memory cell. Selective ion implantation may be used to reduce the embedded resistor resistance for memory cells within a particular region of the memory array and to form two or more different sets of embedded resistors within the memory array.
A method for manufacturing a semiconductor memory, comprising:
A method for manufacturing a semiconductor memory, comprising:
Dependencies are inferred from the claim text.