Thin film transistor and display device
AssigneeKobe Steel, Ltd.
InventorsAya Miki, Shinya Morita, Hiroshi Goto, Hiroaki Tao, Toshihiro Kugimiya
Life of this patent
Estimating the term…
Loading patent…
AssigneeKobe Steel, Ltd.
InventorsAya Miki, Shinya Morita, Hiroshi Goto, Hiroaki Tao, Toshihiro Kugimiya
Estimating the term…
Provided is a thin film transistor comprising an oxide semiconductor thin film layer and has a threshold voltage that does not change much due to light, a bias stress or the like, thereby exhibiting excellent stress stability. A thin film transistor of the present invention is provided with: a gate electrode; two or more oxide semiconductor layers that are used as a channel layer; an etch stopper layer for protecting the surfaces of the oxide semiconductor layers; a source-drain electrode; and a gate insulator film interposed between the gate electrode and the channel layer. The metal elements constituting an oxide semiconductor layer that is in direct contact with the gate insulator film are In, Zn and Sn. The hydrogen concentration in the gate insulator film, which is in direct contact with the oxide semiconductor layer, is controlled to 4 atomic % or less.
A thin film transistor, comprising:
Dependencies are inferred from the claim text.