Semiconductor device having dummy cell array

A dummy cell of a semiconductor device, comprising:

• a plurality of dummy gate lines parallel to each other in a first direction and extending in a second direction that is orthogonal to the first direction;
• a first interlayer insulating pattern that insulates the dummy gate lines from each other;
• a first dummy filling pattern between the dummy gate lines, the first dummy filling pattern formed in the first interlayer insulating pattern;
• a second interlayer insulating layer on the first interlayer insulating layer;
• a dummy via extending through and insulated by the second interlayer insulating layer;
• and
• a dummy wiring line on the dummy via, the dummy wiring line and the dummy via aligned with each other along the second direction.

A semiconductor device comprising:

• a plurality of dummy gate lines parallel to each other in a first direction and extending in a second direction that is orthogonal to the first direction;
• a plurality of first dummy filling patterns between the plurality of dummy gate lines, the first dummy filling patterns parallel to each other in the first direction, and arranged apart from each other in the second direction, the first dummy filling patterns separate from the dummy gate lines;
• an interlayer insulating layer that insulates the first dummy filling patterns from each other, the first dummy filling patterns formed in the interlayer insulating layer;
• a plurality of first dummy vias on the plurality of first dummy filling patterns;
• a plurality of first dummy wiring lines connected to the first dummy filling patterns through the plurality of first dummy vias, the first dummy wiring lines extending in the second direction, and parallel to each other in the first direction;
• a plurality of second dummy vias arranged on the plurality of first dummy wiring lines;
• and
• a plurality of second dummy wiring lines connected to the plurality of second dummy vias, extend along the first direction, and arranged in parallel to each other along the second direction.