Semiconductor device including conductive layer with conductive plug

A semiconductor device comprising a first conductive line, the first conductive line comprising:

• a first portion extending in a first direction and including first and second end parts;
• a second portion extending in a second direction from the second end part of the first portion, the second direction being substantially perpendicular to the first direction, the second portion including third and fourth end parts, the third end part of the second portion merging with the second end part of the first portion;
• a third portion extending in the first direction from the fourth end part of the second portion toward the first end part of the first portion, the third portion including fifth and sixth end parts, the fifth end part of the third portion merging with the fourth end part of the second portion;
• a fourth portion extending in the first direction from the second portion on an opposite side to the first end part of the first portion;
• and
• wherein the fourth portion is no less in the second direction than a space between the first and third portions.

A semiconductor device comprising a first conductive line, the first conductive line comprising:

• a first portion extending in a first direction and including first and second end parts;
• a second portion extending in a second direction from the second end part of the first portion, the second direction being substantially perpendicular to the first direction, the second portion including third and fourth end parts, the third end part of the second portion merging with the second end part of the first portion;
• a third portion extending in the first direction from the fourth end part of the second portion toward the first end part of the first portion, the third portion including fifth and sixth end parts, the fifth end part of the third portion merging with the fourth end part of the second portion;
• a fourth portion extending in the first direction from the second portion on an opposite side to the first end part of the first portion;
• and
• a conductive plug on the fourth portion and having a diameter smaller than a size of the fourth portion.

A semiconductor device comprising a first conductive line and a second conductive line,

• the first conductive line comprising:
• a first portion extending in a first direction and including first and second end parts;
• a second portion extending in a second direction from the second end part of the first portion, the second direction being substantially perpendicular to the first direction, the second portion including third and fourth end parts, the third end part of the second portion merging with the second end part of the first portion;
• a third portion extending in the first direction from the fourth end part of the second portion toward the first end part of the first portion, the third portion including fifth and sixth end parts, the fifth end part of the third portion merging with the fourth end part of the second portion;
• and
• a first tab portion extending in the first direction from the second portion on an opposite side to the first end part of the first portion;
• the second conductive line comprising:
• a fourth portion extending in the first direction and including seventh and eighth end parts;
• a fifth portion extending in the second direction from the eighth end part of the fourth portion, the fifth portion including ninth and tenth end parts, the ninth end part of the fifth portion merging with the eighth end part of the fourth portion;
• a sixth portion extending in a first direction from the tenth end part of the fifth portion toward the seventh end part of the fourth portion, the sixth portion including eleventh and twelfth end parts, the eleventh end part of the sixth portion merging with the tenth end part of the fifth portion;
• and
• a second tab portion extending in the first direction from the fifth portion on an opposite side to the seventh end part of the first portion;
• and
• the first and second conductive lines being disposed such that the first portion of the first conductive line and the sixth portion of the second conductive line are in line and the third portion of the first conductive line and the fourth portion of the second conductive line are in line.

A semiconductor device, comprising:

• a semiconductor substrate;
• a conductive layer including a plurality of loops of conductive material over the semiconductor substrate, each of the plurality of loops comprising:
• a first opening and a second opening;
• a first portion and a second portion sandwiching the first opening;
• a third portion and a fourth portion sandwiching the second opening;
• a first tab portion connected to the first portion and the third portion and having a first length in a first direction and a first width in a second direction perpendicular to the first direction, the first tab portion being divided into a first inner tab portion and a first outer tab portion, the first inner tab portion being sandwiched between the first portion and the third portion, the first outer tab portion being located out of a region which the first portion and the third portion sandwich;
• and
• a second tab portion connected to the second portion and the fourth portion and having a second length in the first direction and a second width in the second direction, the second tab portion being divided into a second inner tab portion and a second outer tab portion, the second inner tab portion being sandwiched between the second portion and the fourth portion, the second outer tab portion being located out of a region which the second portion and the fourth portion sandwich;
• and
• a plurality of first conductive plugs, with each of the conductive plugs being provided over the first outer tab portion of the respective first tab potion of one of the conductive loops, the conductive plugs each having a diameter smaller than the first length and smaller than the first width.