Systems and methods for preparation of samples for sub-surface defect review

A system for preparing a sample for sub-surface review, the system comprising:

• an inspection apparatus configured to inspect a device for defects, select defects for sub-surface review, and output data on the selected defects to a first results file;
• a scanning electron microscope apparatus configured to re-detect a defect at a location indicated in the first results file, mark on the sample the location of the defect with at least one distinct marking point with predetermined positioning relative to the location of the defect, receive a design file with a design for the device, ascertain a cut location and a cut angle in at least a partly-automated manner using the design for the device, and revise the first results file to generate a second results file which includes the cut location and the cut angle,
• wherein said at least one distinct marking point comprises a geometrical pattern which has alternating darker and lighter marking regions around a center location, each said marking region being a polygon having a vertex at the center location.