Method to form SOI fins on a bulk substrate with suspended anchoring

A method of forming a semiconductor structure, said method comprising:

• forming a plurality of semiconductor fins extending upwards from a remaining portion of a bulk semiconductor substrate, wherein a hard mask cap is present on each semiconductor fin of said plurality of semiconductor fins;
• forming a sacrificial dielectric material portion between each semiconductor fin of said plurality of semiconductor fins, wherein each sacrificial dielectric material portion has a topmost surface that is vertically offset and located below a topmost surface of each hard mask cap;
• forming an anchoring structure having an opening atop each sacrificial dielectric material portion and each hard mask cap, said opening is located in an area between said semiconductor fins;
• removing an entirety of each sacrificial dielectric material portion by etching through said opening in said anchoring structure;
• forming an oxide layer within an upper portion of said remaining portion of said bulk semiconductor substrate, wherein a portion of said oxide layer extends beneath each semiconductor fin;
• and
• removing said anchoring structure.