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US 9,318,355 B2Granted
Power semiconductor device with a double metal contact
AssigneeInfineon Technologies Americas Corp.
InventorsRobert Montgomery, Hugo Burke, Philip Parsonage, Susan Johns, David Paul Jones
Life of this patent
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Abstract
A power semiconductor device that includes a stack of a thin metal layer and a thick metal layer over the active region thereof, and a method for the fabrication thereof.
Claims9
A power semiconductor device comprising:
- a semiconductor body including an active region having source regions and gate electrodes;
- a first metal layer over said semiconductor body and coupled to said source regions;
- a gate bus over said semiconductor body lateral to and spaced from said first metal layer, said gate bus including a metallic gate bus over a polysilicon gate bus and an insulation body between said polysilicon gate bus and said semiconductor body, wherein said gate bus is not disposed within a trench;
- a buffer body over said gate bus and between said gate bus and said first metal layer;
- a second metal layer over said first metal layer and extending over and covering said buffer body, a portion of said second metal layer forming a gate pad disposed over said active region.
2 more elements
Dependencies are inferred from the claim text.