Three dimensional three semiconductor high-voltage capacitors
AssigneeTexas Instruments Incorporated
InventorsXiangzheng Bo, Douglas T. Grider
Life of this patent
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Abstract
An integrated circuit capacitor. The capacitor includes a substrate, a first conductor, and a first insulating region between the first conductor and the substrate. The capacitor also includes a second conductor, a second insulating region between the first conductor and the second conductor, a third conductor, and a third insulating region between the first conductor and the third conductor. The capacitor also includes a fourth conductor and a fourth insulating region between the first conductor and the fourth conductor.
Claims16
An integrated circuit capacitor, comprising:
- a substrate;
- a first conductor;
- a first insulating region between the first conductor and the substrate;
- a second conductor;
- a second insulating region between the first conductor and the second conductor;
- a third conductor;
- a third insulating region between the first conductor and the third conductor, the third conductor being electrically insulated from the first conductor and also the second conductor;
- a fourth conductor;
- and
- a fourth insulating region between the first conductor and the fourth conductor, the fourth conductor being electrically insulated from the first conductor and also the second conductor.
A method of forming an integrated circuit capacitor relative to a substrate, comprising:
- forming a first conductor;
- forming a first insulating region between the first conductor and the substrate;
- forming a second conductor;
- forming a second insulating region between the first conductor and the second conductor;
- forming a third conductor;
- forming a third insulating region between the first conductor and the third conductor, the third conductor being electrically insulated from the first conductor and also the second conductor;
- forming a fourth conductor;
- and
- forming a fourth insulating region between the first conductor and the fourth conductor, the fourth conductor being electrically insulated from the first conductor and also the second conductor.
Dependencies are inferred from the claim text.