Production method for active element substrate, active element substrate, and display device
AssigneeSharp Kabushiki Kaisha
InventorsDaisuke Fuse, Masaya Yamamoto, Naoki Takao
Life of this patent
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Abstract
The present invention provides a method of manufacturing an active element substrate aimed at reducing the production costs of an interlayer insulating film made from a spin-on glass material, for example. In the method of manufacturing an active element substrate, an interlayer insulating film is formed using a printing method that employs a plate. The plate includes: a main pattern that overlaps with signal lines that enclose openings; and fine line patterns that reduce, in the widthwise direction of the signal lines, the inclination of the edges of the printed pattern printed by the main pattern.
Claims11
A method of manufacturing an active element substrate that has a plurality of scanning lines formed on a substrate, a plurality of signal lines that intersect with the scanning lines, and a plurality of light-transmissive portions in regions enclosed by the scanning lines and the signal lines, the method comprising:
- preparing said substrate having the plurality of said scanning lines, the plurality of said signal lines, and the plurality of said light-transmissive portions;
- and
- printing an interlayer insulating film at intersections between the scanning lines and the signal lines, using a relief plate or an intaglio plate,
- wherein the relief plate or the intaglio plate has:
- a main pattern at locations overlapping the respective signal lines;
- and
- edge-softening patterns that reduce, in a widthwise direction of the signal lines, an inclination of edges of a pattern printed by the main pattern,
- wherein the relief plate or the intaglio plate does not have a tapered cross-sectional shape, and
- wherein the relief plate or the intaglio plate has surfaces that are parallel to a contact surface of the substrate and surfaces that are perpendicular to the contact surface of the substrate.
A method of manufacturing an active element substrate that has a plurality of scanning lines formed on a substrate, a plurality of signal lines that intersect with the scanning lines, and a plurality of light-transmissive portions in regions enclosed by the scanning lines and the signal lines, the method comprising:
- preparing said substrate having a plurality of said scanning lines, the plurality of said signal lines, and the plurality of said light-transmissive portions;
- and
- printing an interlayer insulating film at intersections between the scanning lines and the signal lines, using a relief plate or an intaglio plate,
- wherein the relief plate or the intaglio plate has:
- a main pattern at locations overlapping the respective signal lines;
- and
- edge-softening patterns that reduce, in a widthwise direction of the signal lines, an inclination of edges of a pattern printed by the main pattern,
- wherein the edge-softening patterns are separated from the main pattern, and
- wherein a width of the edge-softening patterns in the widthwise direction of the signal lines is less than a minimum printable line width.
A method of manufacturing an active element substrate that has a plurality of scanning lines formed on a substrate, a plurality of signal lines that intersect with the scanning lines, and a plurality of light-transmissive portions in regions enclosed by the scanning lines and the signal lines, the method comprising:
- preparing said substrate having the plurality of said scanning lines, the plurality of said signal lines, and the plurality of said light-transmissive portions;
- and
- printing an interlayer insulating film at intersections between the scanning lines and the signal lines, using a relief plate or an intaglio plate,
- wherein the relief plate or the intaglio plate has:
- a main pattern at locations overlapping the respective signal lines;
- and
- edge-softening patterns that reduce, in a widthwise direction of the signal lines, an inclination of edges of a pattern printed by the main pattern,
- wherein the edge-softening patterns are small protrusion patterns that protrude outwards from both sides of the main pattern in the widthwise direction of the signal lines, and
- wherein a line width of base portions that are opposite to tips of the small protrusions is less than a minimum printable line width.
Dependencies are inferred from the claim text.