Ultraviolet light generating target, electron-beam-excited ultraviolet light source, and method for producing ultraviolet light generating target

An electron-beam-excited ultraviolet light source, comprising:

• an ultraviolet light generating target including a substrate made of sapphire, quartz, or rock crystal, and a light-emitting layer provided on the substrate and generating ultraviolet light upon receiving an electron beam;
• an electron source providing an electron beam to the ultraviolet light generating target;
• and
• a vacuum-pumped container in which the ultraviolet light generating target and the electron source are arranged,
• wherein
• the light-emitting layer includes powdered or granular Pr:LuAG crystals,
• the electron beam is incident on the light-emitting layer through a conductive film, and
• the ultraviolet light generated in the light-emitting layer output from the substrate.