Sample introduction device and charged particle beam instrument

A sample introduction device for introducing a sample into a sample chamber of a charged particle beam instrument, said sample introduction device comprising:

• a pre-evacuation chamber for performing pre-evacuation;
• a sample holder having a sample holding portion capable of holding the sample;
• a mechanical drive arrangement for moving the sample holder between the pre-evacuation chamber and the sample chamber;
• and
• a controller for controlling the mechanical drive arrangement,
• wherein said controller is programmed to perform a first operation for controlling the mechanical drive arrangement to move a support member such that the support member provides support of the sample holder when its sample holding portion is in the pre-evacuation chamber and to bring the support member to a halt, a second operation for making a decision as to whether the sample holding portion can be moved into the sample chamber, based on the position at which the support member is halted, and a third operation for controlling the mechanical drive arrangement to move the support member providing support of the sample holder such that the sample holding portion moves from the pre-evacuation chamber into the sample chamber if the decision is affirmative to indicate that the sample holding portion can be moved into the sample chamber.