Charged particle beam device having an energy filter
AssigneeHitachi High-Technologies Corporation
InventorsYuko Sasaki, Hiroyuki Ito
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Abstract
Provided is a charged particle beam device having an energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles emitted from a sample to an energy filter, and a change in brightness value with the change of voltage applied to the energy filter is found for each of a plurality of deflection conditions for the deflector, and a deflection condition such that a change in the brightness value satisfies a predetermined condition is set as the deflection condition for the deflector.
Claims4
A charged particle beam device, comprising a charged particle source;
- a detector to detect charged particles acquired based on irradiation of a sample with a beam emitted from the charged particle source;
- and an energy filter to perform energy filtering of charged particles emitted from the sample, wherein
- the charged particle beam device further comprises a first deflecting element to deflect charged particles emitted from the sample so as to separate the charged particles away from an optical axis of the beam emitted from the charged particle source, and
- the energy filter comprises a first filter electrode including a plurality of annular electrodes to which different voltages can be separately applied.
Dependencies are inferred from the claim text.