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US 9,318,298 B2Granted
Ion generator and ion generating method
AssigneeSumitomo Heavy Industries Ion Technology Co., Ltd.
InventorMasateru Sato
Life of this patent
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Abstract
An ion generator is provided with: an arc chamber that is at least partially made up of a material containing carbon; a thermal electron emitter that emits thermal electrons into the arc chamber; and a gas introducer that introduces a source gas and a compound gas into the arc chamber. The source gas to be introduced into the arc chamber contains a halide gas, and the compound gas to be introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms.
Claims13
An ion generator comprising:
- an arc chamber that is at least partially made up of a material containing carbon;
- a thermal electron emitter configured to emit thermal electrons into the arc chamber;
- and
- a gas introducer configured to introduce a source gas and a compound gas into the arc chamber, wherein
- the source gas to be introduced into the arc chamber contains a halide gas,
- the compound gas to be introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms, and
- the compound gas is hydrocarbon.
4 more elements
An ion generating method comprising:
- introducing a source gas and a compound gas into an arc chamber that is at least partially made up of a material containing carbon;
- emitting thermal electrons into the arc chamber;
- generating a plasma by collision between the source gas and the thermal electrons;
- and
- extracting ions from the plasma to the outside, wherein
- the source gas to be introduced into the arc chamber contains a halide gas,
- the compound gas to be introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms, and
- the compound gas is a hydrocarbon.
5 more elements
Dependencies are inferred from the claim text.