US 9,318,295 B2 · Carbon nanotube patterning on a metal substrate

Abstract

A CNT electron source, a method of manufacturing a CNT electron source, and a solar cell utilizing a CNT patterned sculptured substrate are disclosed. Embodiments utilize a metal substrate which enables CNTs to be grown directly from the substrate. An inhibitor may be applied to the metal substrate to inhibit growth of CNTs from the metal substrate. The inhibitor may be precisely applied to the metal substrate in any pattern, thereby enabling the positioning of the CNT groupings to be more precisely controlled. The surface roughness of the metal substrate may be varied to control the density of the CNTs within each CNT grouping. Further, an absorber layer and an acceptor layer may be applied to the CNT electron source to form a solar cell, where a voltage potential may be generated between the acceptor layer and the metal substrate in response to sunlight exposure.

Claims14

Dependent claims

A method of manufacturing an electron source, said method comprising:

applying an inhibitor to a first plurality of regions of a metal substrate, wherein said inhibitor is operable to inhibit growth of carbon nanotubes in said first plurality of regions of said metal substrate;
and
growing carbon nanotubes on said metal substrate in a second plurality of regions separate from said first plurality of regions;
wherein said applying an inhibitor further comprises:
applying photoresist to said metal substrate;
exposing a portion of said photoresist to ultraviolet light using a photolithography process, wherein said portion of said photoresist is disposed on said second plurality of regions;
removing unexposed portions of said photoresist disposed on said first plurality of regions of said metal substrate;
applying said inhibitor to said metal substrate and said portion of said photoresist;
and
removing said portion of said photoresist and leaving said inhibitor disposed on said first plurality of regions of said metal substrate.

7 more elements

Dependencies are inferred from the claim text.

Carbon nanotube patterning on a metal substrate

Life of this patent

Carbon nanotube patterning on a metal substrate

Life of this patent

Abstract

Claims14