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US 9,316,919 B2Granted
Lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsTimotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Mark Kroon, Kees Van Weert
Life of this patent
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Abstract
A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final element of the radiation detector.
Claims20
A lithographic apparatus, comprising:
- a substrate table constructed to hold a substrate;
- a projection system configured to project a patterned radiation beam onto a target portion of the substrate;
- a liquid supply system configured to provide a liquid to a space below the projection system;
- and
- a sensor arranged to receive radiation from the projection system after having passed through the liquid, the sensor comprising:
- a radiation detector;
- a radiation-shielding member having an aperture;
- and
- a radiation-transmissive body extending from the radiation-shielding member toward the radiation detector, and arranged such that radiation projected by the projection system comes through the aperture and into the body, the body arranged to couple the radiation toward the radiation detector,
- wherein the radiation detector is blocked from liquid on a side of the radiation-shielding member opposite to the radiation detector,
- wherein the sensor is configured to prevent a substantial total internal reflection in the path of the radiation between the radiation-shielding member and the radiation detector after the radiation has passed through the liquid and into the aperture, and
- wherein the sensor is configured to provide internal reflection at a side surface of an optical element located in the path of the radiation from the surface toward the detector.
9 more elements
A lithographic apparatus, comprising:
- a substrate table constructed to hold a substrate;
- a projection system configured to project a patterned radiation beam onto a target portion of the substrate;
- a liquid supply system configured to provide a liquid to a space below the projection system;
- and
- a sensor arranged to receive radiation from the projection system, the sensor comprising:
- a radiation detector;
- a radiation-transmissive body extending from a radiation-shielding member toward the radiation detector, and arranged such that radiation projected by the projection system incident on a surface of the body comes into the body, the body arranged to couple the radiation toward the radiation detector;
- and
- a lens array between the surface and the radiation detector, the lens array arranged to couple the radiation toward the radiation detector,
- wherein the radiation detector is blocked from liquid on a side of the body opposite to the radiation detector, and
- wherein the sensor is configured to prevent a substantial total internal reflection in the path of the radiation between the surface and the lens array after the radiation has passed through the liquid and onto the surface.
8 more elements
A lithographic apparatus, comprising:
- a substrate table constructed to hold a substrate;
- a projection system configured to project a patterned radiation beam onto a target portion of the substrate;
- a liquid supply system configured to provide a liquid to a space below the projection system;
- and
- a sensor arranged to receive radiation from the projection system after having passed through the liquid, the sensor comprising:
- a radiation detector;
- a radiation-shielding member having an aperture;
- and
- a radiation-transmissive body connected to the radiation-shielding member and extending from the radiation-shielding member toward the radiation detector, and arranged such that radiation projected by the projection system comes through the aperture and into the body, the body arranged to couple the radiation toward the radiation detector, the radiation-transmissive body comprising a plano-convex lens,
- wherein the radiation detector is blocked from liquid on a side of the radiation-shielding member opposite to the radiation detector.
7 more elements
Dependencies are inferred from the claim text.