Imprint method, and imprint apparatus for implementing the same
AssigneeDai Nippon Printing Co., Ltd.
InventorsYuki Aritsuka, Naoko Nakata
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Abstract
An imprint method includes, in the peeling step of peeling a mold off the material layer to be transferred, a region-of-contact recognition operation of recognizing and determining a region of contact of the mold with the material layer to be transferred, a center-of-gravity locating operation of determining a center of gravity of a morphology of the thus recognized region of contact on the basis of that morphology, and a peeling operation of determining a point of force for applying peeling force to the mold or the imprinting substrate in relation to the center of gravity determined by the center-of-gravity locating operation, thereby acting the peeling force on the point of force.
Claims8
An imprint method, comprising a transfer material layer formation step of interposing a material or material layer to be transferred between a surface of a mold having an concavo-convex structure region and an imprinting substrate to form a transfer material layer having a concavo-convex structure pattern, and a peeling step of peeling said mold off said material layer to be transferred, wherein:
- said peeling step comprises a region-of-contact recognition operation of recognizing and determining a region of contact of said mold with said material layer to be transferred, a center-of-gravity locating operation of determining a center of gravity of a morphology of the thus recognized region of contact on the basis of said morphology, and a peeling operation of determining a point of force for applying peeling force to said mold or said imprinting substrate in relation to the center of gravity determined by said center-of-gravity locating operation, thereby acting the peeling force on said point of force.
Dependencies are inferred from the claim text.