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US 9,316,790 B2Granted
Faceted, germanium slotted waveguide
AssigneeBAE Systems Information and Electronic Systems Integration Inc.
InventorsRobert L. Kamocsai, Vu A. Vu
Life of this patent
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Abstract
A waveguide having a substrate, a first germanium sidewall and a second germanium sidewall. The waveguide is formed by growing the first germanium sidewall and second germanium sidewall on the substrate.
Claims9
A method for manufacturing a waveguide, comprising:
- providing a substrate;
- depositing a protective layer onto the substrate;
- removing a portion of the protective layer from the substrate to expose a plurality of areas on the surface of the substrate;
- growing a first quality of germanium in a first area on the surface of the substrate to form a first sidewall having a uniform slope;
- and
- growing a second quality of germanium in a second area on the surface of the substrate to form a second sidewall having a uniform slope, wherein the first sidewall, the second sidewall, and the top of the protective layer define the waveguide.
3 more elements
Dependencies are inferred from the claim text.