Method of manufacturing microlens array substrate, microlens array substrate, electro-optic device, and electronic

A method of manufacturing a microlens array substrate in which a plurality of microlenses are arranged in a first area, the method comprising:

• forming a groove part along an outer edge of the first area on a first surface of a substrate;
• forming a first mask layer to cover a side of the first surface of the substrate, forming a plurality of first openings corresponding to the plurality of microlenses in the first area of the first mask layer, and forming second openings along the outer edge of the first area;
• performing isotropic etching on the substrate through the first mask layer, forming a plurality of first recesses corresponding to the plurality of first openings in the first area, and forming second recesses corresponding to the second openings across an edge part on a side of the first area of the groove part;
• removing the first mask layer from the substrate;
• forming a light transmission material layer that has a refractive index, which is different from a refractive index of the substrate, to cover the side of the first surface of the substrate and to bury the plurality of first recesses and the second recesses;
• and
• planarizing an upper surface of the light transmission material layer.