US 9,316,683 B2 · Apparatus for testing electronic devices

Abstract

An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

Claims10

Dependent claims

An apparatus for testing an integrated circuit of a device, comprising:

an apparatus frame;
a holder, having a surface against which the device is placed, mounted to the apparatus frame;
a cartridge frame mounted to the apparatus frame;
a contactor support structure;
a contactor interface on the contactor support structure;
a plurality of terminals held by the contactor support structure;
a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals;
and
an actuator connected between the cartridge frame and the contactor support structure, having first and second portions that are movable relative to one another to move the contactor support structure relative to the cartridge frame and toward the surface of the holder so that the terminals are urged against contacts of the device.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application

14/833,938Filed 24 Aug 2015 · division

Priority

27 Apr 2005

Published

US 2015/0369858 A124 Dec 2015

Granted

19 Apr 2016

Term ends

Not estimatedThe source records don’t support an estimate.

Classification17 codes

G01R 31/287
Complete testing stations; systems; procedures; software aspects: procedures; Software aspects
G01R 31/003
Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by…
G01R 31/26
Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by…
G01R 31/2642
Testing of individual semiconductor devices: testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests

Family

Application60/675,546Us provisional application · filed 27 Apr 2005

Application60/682,989Us provisional application · filed 19 May 2005

Application60/687,502Us provisional application · filed 3 Jun 2005

Application11/413,323Parent of this division · filed 27 Apr 2006

US 7,762,822 B2Parent of this division · filed 27 Jul 2010

US 2015/0369858 A1Pre-grant publication · published 24 Dec 2015

US 2007/0001790 A1Published application

US 9,316,683 B2This patent

From the US filing history. Foreign family members aren’t listed.

Apparatus for testing electronic devices

Life of this patent

Apparatus for testing electronic devices

Life of this patent

Abstract

Claims10