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US 9,316,559 B2Granted
Leak detection appliance
AssigneeInficon GmbH
InventorUlrich Döbler
Life of this patent
Estimating the term…
Abstract
The leak detection appliance has a test inlet to which a test chamber containing the test specimen can be connected. A high-vacuum pump produces a high vacuum in a test gas detector. A backing pump contains two pump stages. In order to evacuate the test chamber, the pump stages are operated in parallel mode, with their suction capabilities being added. When the necessary vacuum has been achieved, the pump stages are operated in series in order to produce the necessary high vacuum which is required for high detection sensitivity on the test gas detector.
Claims8
A leak detection apparatus comprising:
- a test inlet for connection of a test chamber, a high-vacuum pump connected to a test gas detector, and a backing vacuum pump including at least two pump stages wherein a tap is provided between said pump stages of the backing vacuum pump and that the pump stages are selectively operated in series for a leak detection, or in parallel for roughing of the test chamber;
- wherein a tap valve device which comprises said tap is provided in a suction line connecting the outlet of the first pump stage with the inlet of the second pump stage of the backing pump, said tap valve device, when in a first state, connecting the outlet of the first pump stage to the inlet, and, when in a second state, to the outlet of the second pump stage via said tap;
- and
- wherein a bypass valve is operative to connect the test inlet to the inlet of the second pump stage and said bypass valve is opened when the tap valve device is in its second state, said bypass valve being separate from the tap valve device.
1 more element
A leak detection apparatus comprising:
- a test inlet for connection of a test chamber;
- a high-vacuum pump connected to a test gas detector;
- a backing vacuum pump comprising at least a first pump stage and a second pump stage, said backing vacuum pump configurable for a leak detection or a roughing of the test chamber;
- a three-way valve comprising a tap, said three-way valve disposed between said at least first pump stage and said second pump stage of the backing vacuum pump in a suction line connecting an outlet of the first pump stage with an inlet of the second pump stage of said backing vacuum pump;
- a bypass valve operative to connect the test inlet to the inlet of the second pump stage;
- and
- wherein said at least first pump stage and said second pump stage are selectively operated in series for said leak detection, or in parallel for said roughing of the test chamber, such that
- when said three-way valve is in a first state in series for a leak detection, the outlet of the first pump stage is connected to the inlet of said second pump stage;
- and
- when said three-way valve is in a second state in parallel for roughing of the test chamber, the outlet of the first pump stage is connected to the outlet of the second pump stage via said tap, and said bypass valve is open.
7 more elements
Dependencies are inferred from the claim text.