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US 9,316,555 B2Granted
Cold cathode ionization vacuum gauge and inner wall protection member
AssigneeCanon Anelva Corporation
InventorsItaru Enomoto, Hideo Mano
Life of this patent
Estimating the term…
Abstract
A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
Claims8
A cold cathode ionization vacuum gauge, comprising:
- two electrodes disposed such that one of the electrodes is surrounded by the other electrode having a cylindrical shape to thereby form a discharge space therebetween;
- and
- an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode in a circumferential direction,
- wherein the electrode protection member includes a protection portion formed of an elastic member having electric conductivity and a plate-shape, the elastic member being capable of elastic deformation into a cylindrical shape and being capable of changing the diameter of the cylindrical shape in accordance with the elastic deformation, and
- wherein the protection portion is elastically deformed along a shape of the inner wall surface in the circumferential direction, presses the inner wall surface of the other electrode, and is to be electrically connected to the other electrode.
2 more elements
An electrode protection member,
- wherein the electrode protection member has electric conductivity and is disposed in a discharge space between two electrodes, the two electrodes being disposed such that one of the electrodes is surrounded by the other electrode having a cylindrical shape to thereby form the discharge space,
- wherein the electrode protection member is configured to protect an inner wall surface of the other electrode in a circumferential direction, and
- wherein the electrode protection member comprises a protection portion formed of an elastic member having electric conductivity and a plate-shape, the elastic member being capable of elastic deformation into a cylindrical shape and being capable of changing the diameter of the cylindrical shape in accordance with the elastic deformation, and
- wherein the protection portion is elastically deformed along a shape of the inner wall surface in the circumferential direction, presses the inner wall surface of the other electrode, and is to be electrically connected to the other electrode when disposed in the discharge space.
1 more element
Dependencies are inferred from the claim text.