Fringe shift measurement system having an optical phase mask with phase-shifted first and second halves
OwnerThomas Patrick Ryan, Donald Bobbitt Jonesinventors
Life of this patent
Estimating the term…
Loading patent…
OwnerThomas Patrick Ryan, Donald Bobbitt Jonesinventors
Estimating the term…
A fringe shift measurement system is provided and includes an optical phase mask configured to receive light fringes from optical flats. The optical phase mask has first and second halves, each half having alternating patterns of opaque rings and transparent rings. The first half pattern is phase-shifted with respect to the second half pattern. The first and second halves are configured to alternately block the light fringes or allow the light fringes to pass through the optical phase mask. A splitter is configured to direct the light fringes from the optical phase mask in desired directions. Concentrators are positioned to receive light fringes from the splitter and configured to focus the light fringes in a desired location. Detectors are configured to receive the focused light fringes from the concentrators and configured to convert the focused light fringes into digital signals. A control unit is configured to analyze the digital signals.
A fringe shift measurement system for determining the shift of fringes of an interferometer, the system comprising:
A method of using a fringe shift measurement system, the method comprising the steps of:
Dependencies are inferred from the claim text.