Cylinder preparation for high purity acetylene
AssigneePraxair Technology, Inc.
InventorsXuemei Song, Lloyd Anthony Brown, Thomas Thompson, David C. Johnson
Life of this patent
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Abstract
This invention relates in part to a method for preparing a pressure vessel for receiving high purity acetylene at elevated pressure. The method involves providing a porous filler-containing pressure vessel, deep cleaning the porous filler-containing pressure vessel, purifying a solvent, and charging the purified solvent into the deep cleaned, porous filler-containing pressure vessel. The pressure vessel is then charged with high purity acetylene for storage, transport and/or delivery of the high purity acetylene. The high purity acetylene may be useful as a source material for depositing carbon and carbon-containing films in semiconductor applications.
Claims9
A method for storing, transporting and/or delivering high purity acetylene at elevated pressure in a pressure vessel, said method comprising:
- providing a porous filler-containing pressure vessel;
- deep cleaning the porous filler-containing pressure vessel;
- purifying a solvent by vacuum degassing said solvent in a vacuum container containing said solvent and vapor space above said solvent;
- charging the purified solvent into the deep cleaned, porous filler-containing pressure vessel to provide said pressure vessel;
- charging said pressure vessel with high purity acetylene at elevated pressure;
- and
- storing, transporting and/or delivering said high purity acetylene at elevated pressure in said pressure vessel.
An acetylene-containing pressure vessel prepared by a process comprising steps of:
- providing a porous filler-containing pressure vessel;
- deep cleaning the porous filler-containing pressure vessel;
- purifying a solvent by vacuum degassing said solvent in a vacuum container containing said solvent and vapor space above said solvent;
- charging the purified solvent into the deep cleaned porous filler-containing pressure vessel;
- and
- charging said pressure vessel with high purity acetylene at elevated pressure.
Dependencies are inferred from the claim text.