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US 9,315,920 B2Granted
Growth substrate and light emitting device comprising the same
AssigneeLG Electronics Inc.
InventorsHyunggu Kim, Hwankuk Yuh, Hyosang Yu
Life of this patent
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Abstract
A growth substrate including a substrate having a growth surface including a plurality of steps inclining in a first direction; a first layer disposed on the growth surface, the first layer including an A-plane or an M-plane in an upper part thereof, a plurality of protrusions having an inclined surface on an upper surface thereof, and nitride; a mask layer including a dielectric material and having at least a portion disposed on the protrusions; and a second layer disposed on the mask layer and including nitride.
Claims10
A growth substrate comprising:
- a substrate having a growth surface including a plurality of steps inclining in a first direction;
- a first layer disposed on the growth surface, the first layer including:
- an A-plane or an M-plane in an upper part thereof,
- a plurality of protrusions having an inclined surface on an upper surface thereof, and
- nitride;
- a mask layer including a dielectric material and having at least a portion disposed on the protrusions;
- and
- a second layer disposed on the mask layer and including nitride.
5 more elements
Dependencies are inferred from the claim text.