Isolation of microwave sources through bellows
AssigneeApplied Materials, Inc.
InventorsBenjamin M. Johnston, Shinichi Kurita
Life of this patent
Estimating the term…
Abstract
A bellows which forms a flexible coupling between the lid of a processing chamber and an antenna feed through. One embodiment provides an apparatus comprising a chamber body having a chamber lid, a feed through extending through the chamber lid, an antenna coupled to and extending through the feed through to an internal volume of the chamber body, and a bellows comprising a first flange, the first flange coupled to the feed through, a second flange, the second flange coupled to the chamber lid, and a center portion extending between the first flange and the second flange.
Claims20
An apparatus, comprising:
- a chamber body having a chamber lid;
- a feed through extending through the chamber lid;
- an antenna coupled to and extending through the feed through to an internal volume of the chamber body;
- and
- a bellows comprising:
- a first flange, the first flange coupled to the feed through;
- a second flange, the second flange coupled to the chamber lid;
- and
- a center portion extending between the first flange and the second flange.
An apparatus, comprising:
- a chamber body having a chamber lid;
- a feed through extending through the chamber lid, the feed through not being coupled directly to the chamber lid;
- an antenna coupled to and extending through the feed through to an internal volume of the chamber body;
- and
- a bellows forming a vacuum seal between the feed through and the chamber lid, the bellows comprising:
- a first flange, the first flange coupled to the feed through;
- a second flange, the second flange coupled to the chamber lid;
- and
- a center portion comprising a flexible region, the center portion extending between the first flange and the second flange.
A method for isolating an antenna, comprising:
- providing a chamber body having a chamber lid;
- coupling a bellows to the chamber body;
- coupling a feed through to the bellows;
- disposing an antenna in the feed through;
- and
- evacuating the chamber body to form a vacuum condition in the chamber, wherein the chamber lid undergoes a deflection in response to the evacuating, and the bellows reduces the degree to which the deflection of the chamber lid is translated to the feed through and the antenna.
Dependencies are inferred from the claim text.