Showerhead for film depositing vacuum equipment

A showerhead for film-depositing vacuum equipment for use with a reactive gas and a purge gas, said showerhead comprising a purge gas showerhead module, a first reactive gas showerhead module, a purge gas redistribution space, and a cooling jacket;

• said first reactive gas showerhead module being disposed above said cooling jacket and comprising:
• a ceiling plate, a bottom plate and a wall;
• at least one reactive gas inlet for introducing the reactive gas into said first reactive gas showerhead module;
• and
• a first plurality of reactive gas injection tubes for injecting the reactive gas for film depositing, wherein said plurality of reactive gas injection tubes extend through said cooling jacket;
• and
• a plurality of hollow guide tubes having upper and lower ends respectively connected to the ceiling plate and the bottom plate;
• and
• wherein said cooling jacket comprises an inlet and an outlet, said inlet allowing inflow of a coolant and said outlet allowing outflow of the coolant;
• and
• said purge gas redistribution space being located below said purge gas showerhead module and between said first reactive gas showerhead module and said cooling jacket;
• said purge gas showerhead module being disposed above said first reactive gas showerhead module and comprising:
• a purge gas inlet for introducing the purge gas into said purge gas showerhead module;
• and
• a plurality of purge gas injection tubes passing through said guide tubes of the first reactive gas showerhead module for injecting the purge gas into said purge gas redistribution space, the purge gas being subsequently injectable through said cooling jacket for film depositing.