Base material film for dicing sheet and dicing sheet
AssigneeLintec Corporation
InventorsNaoki Taya, Takashi Morioka
Life of this patent
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AssigneeLintec Corporation
InventorsNaoki Taya, Takashi Morioka
Estimating the term…
A base material film used for a dicing sheet, the dicing sheet including the base material film and a pressure-sensitive adhesive layer laminated on one surface of the base material film. The base material film includes a single layer of resin film or multiple layers of resin films, at least the resin film in contact with the pressure-sensitive adhesive layer being formed from a resin composition containing ethylene-(meth)acrylic acid copolymer as a main constituent, the resin composition further containing 0.3 to 17.0 parts by mass of an epoxy compound based on 100 parts by mass of the ethylene-(meth)acrylic acid copolymer. The dicing sheet that uses the base material film does not require application of physical energy such as an electron beam or a γ-ray, and can be reduced in dicing dust that is generated during the dicing of a cut object.
A semiconductor wafer dicing sheet base material film having a surface configured to contact and to be laminated to a pressure-sensitive adhesive layer, the dicing sheet base material film comprising:
A semiconductor wafer dicing sheet assembly, comprising:
Dependencies are inferred from the claim text.