Method for depositing film and oil-repellent substrate

A method for preparing an abrasion resistant oil-repellent film on a substrate comprising:

• depositing a first film on a surface of the substrate by a dry ion-assisted deposition method by simultaneously depositing the first film made of an inorganic material selected from the group consisting of SiO2, ZrO2, Si3N4 and Al2O3, with ion beam exposure, on the substrate to form is the first film to a predetermined thickness, with the depositing stopped when the predetermined thickness is formed;
• and
• the ion-beam exposure continues as a first irradiation treatment to form a roughened surface on the first film with a centerline average roughness (Ra):
• 0.1 to 1000 nm, a 10 point average height (Rz):
• 5 to 2000 nm and a maximum valley depth (Pv):
• is 15 to 200 nm, a cycle of projections:
• 1 to 50 nm;
• and
• depositing a second film having oil repellency on the roughened surface by vacuum vapor deposition to form the abrasion resistant oil-repellent film on the substrate.