Vibration device, article conveyance device, and article sorting device

A vibration device comprising a base, a movable bench elastically supported with respect to the base, a first horizontal excitation unit that vibrates the movable bench in a first horizontal direction, a second horizontal excitation unit that vibrates the movable bench in a second horizontal direction that crosses the first horizontal direction, and a vertical excitation unit that vibrates the movable bench in a vertical direction, the vibration device comprising:

• a first middle bench and a second middle bench between the base and the movable bench, and the vibration device including:
• a first horizontal elastic support unit configured to vibrate in the first horizontal direction;
• a second horizontal elastic support unit configured to vibrate in the second horizontal direction;
• and
• a vertical elastic support unit that elastically connect the base, the first middle bench, the second middle bench, and the movable bench sequentially in the first horizontal direction, the second horizontal direction, and the vertical direction, wherein
• the first horizontal elastic support unit is configured from a first plate-like spring member with a thickness direction approximately matching to the first horizontal direction and with a longitudinal direction arranged in a horizontal direction,
• the second horizontal elastic support unit is configured from a second plate-like spring member with a thickness direction approximately matching to the second horizontal direction and with a longitudinal direction arranged in a horizontal direction,
• the vertical elastic support unit is configured from a third plate-like spring member with a thickness direction approximately matching to the vertical direction and with a longitudinal direction arranged in a horizontal direction,
• the first horizontal direction is X-direction and the second horizontal direction is Y-direction,
• the first horizontal elastic support unit elastically supports the first middle bench respective to the base in the first horizontal direction,
• the second horizontal elastic support unit is connected to the first middle bench and elastically supports the second middle bench in the second horizontal direction,
• the vertical elastic support unit is connected to the second middle bench and elastically supports the movable bench in the vertical direction;
• and
• the base, the first middle bench, the second middle bench, the first horizontal elastic support unit, the second horizontal elastic support unit, and the vertical elastic support unit are located below said movable bench.