Method for manufacturing liquid discharge head
AssigneeCanon Kabushiki Kaisha
InventorsTakanobu Manabe, Yoshinori Tagawa, Hiroyuki Murayama, Shuhei Oya
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AssigneeCanon Kabushiki Kaisha
InventorsTakanobu Manabe, Yoshinori Tagawa, Hiroyuki Murayama, Shuhei Oya
Estimating the term…
A method for manufacturing a liquid discharge head. The method includes a first step of forming a telecentric measurement pattern A by exposure, the telecentric measurement pattern A being part of a measurement pattern that allows determination of inclination of a principal ray caused by an off-axis telecentric degree occurring in a projection exposing device, and a second step of forming a telecentric measurement pattern B by exposure under an exposure condition defocused from an exposure condition in the first step, the telecentric measurement pattern B being another part of the measurement pattern, which allows the determination of the inclination of the principal ray caused by the off-axis telecentric degree occurring in the projection exposing device. The off-axis telecentric degree is determined from an amount of misalignment between relative forming positions of the telecentric measurement patterns A and B and an amount of defocusing.
A method for manufacturing a liquid discharge head, the method including a step of forming a discharge port pattern at a layer containing a photosensitive resin material by exposure using a projection exposing device, the method comprising:
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