Film peeling apparatus
AssigneeSamsung Display Co., Ltd.
InventorsByungchul Lee, Dong Sul Kim, JaeSeok Park, Jinhan Park
Life of this patent
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Abstract
A film peeling apparatus that peels a film attached to a substrate includes a chamber, a transfer unit, and first peeling rollers. The transfer unit is disposed in the chamber to transfer the substrate. The first peeling rollers are disposed in the chamber, each of the first peeling rollers includes a first electrostatic chuck to adsorb a first film attached to the substrate. The first peeling rollers roll the adsorbed first film to peel the first film from the substrate.
Claims12
A film peeling apparatus that peels a film attached to a substrate, comprising:
- a chamber;
- a transfer unit disposed in the chamber to transfer the substrate;
- and
- a first peeling roller disposed in the chamber, the first peeling roller including a first electrostatic chuck to adsorb a first film attached to the substrate,
- wherein the electrostatic chuck includes a plurality of first magnets each having a first polarity and a plurality of second magnets each having a second polarity different from the first polarity, and
- wherein the first peeling roller rolling the adsorbed first film to peel the first film from the substrate.
A film peeling apparatus that peels a film attached to a substrate, comprising:
- a chamber;
- a transfer unit disposed in the chamber to transfer the substrate;
- a first peeling roller disposed in the chamber, the first peeling roller rolling a first film attached to the substrate to peel the first film from the substrate, and the first peeling roller including a temperature controller disposed in the first peeling roller, the temperature controller cooling the first peeling roller, and
- a connection pipe disposed in the first peeling roller, the connecting pipe connecting the temperature controller to a fluid path disposed in a center of the first peeling roller.
Dependencies are inferred from the claim text.