Imprint product and method for producing the same
AssigneeMitsui Chemicals, Inc.
InventorsTadahiro Sunaga, Takashi Oda, Hitoshi Onishi
Life of this patent
Estimating the term…
Abstract
Provided is an imprint product, which is for transcribing a fine pattern of a mold surface and which contains a fluorine-containing cyclic olefin polymer containing repeating unit represented by formula (1) and having a fluorine atom content rate of 40% to 75% by mass.
Claims6
An imprint product on which a fine pattern of a mold surface is transcribed, wherein the imprint product is comprised of a fluorine-containing cyclic olefin polymer comprising a repeating structural unit [A] represented by formula (1) and a repeating structural unit [B] represented by formula (2), with the molar ratio of the structural units being [A]/[B]=95/5 to 25/75, and said fluorine-containing cyclic olefin polymer having a fluorine atom content rate of 40% to 75% by mass:
- wherein in the formula (1), at least one of R1 to R4 represents fluorine, a fluorine-containing C1-C10 alkyl, a fluorine-containing C1-C10 alkoxy, or a fluorine-containing C2-C10 alkoxyalkyl;
- when R1 to R4 represent groups containing no fluorine, R1 to R4 are each selected from hydrogen, a C1-C10 alkyl, a C1-C10 alkoxy, and a C2-C10 alkoxyalkyl;
- each of R1 to R4 are identical or are different from the others;
- and R1 to R4 are optionally joined together to form a cyclic structure:
- wherein in the formula (2), at least one of R5 to R8 represents fluorine, a fluorine-containing C1-C10 alkyl, a fluorine-containing C1-C10 alkoxy, or a fluorine-containing C2-C10 alkoxyalkyl;
- when R5 to R8 represent groups containing no fluorine, R5 to R8 are each selected from hydrogen, a C1-C10 alkyl, a C1-C10 alkoxy, and a C2-C10 alkoxyalkyl;
- each of R5 to R8 are identical with or are different from the others;
- R5 to R8 are optionally joined together to form a cyclic structure;
- and n represents an integer of 1 or 2.
Dependencies are inferred from the claim text.