Process for producing FePt-based sputtering target
AssigneeTanaka Kikinzoku Kogyo K.K.
InventorsTakanobu Miyashita, Yasuyuki Goto, Takamichi Yamamoto, Ryousuke Kushibiki, Masahiro Aono, Masahiro Nishiura
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AssigneeTanaka Kikinzoku Kogyo K.K.
InventorsTakanobu Miyashita, Yasuyuki Goto, Takamichi Yamamoto, Ryousuke Kushibiki, Masahiro Aono, Masahiro Nishiura
Estimating the term…
A process for producing an FePt-based sputtering target includes adding metal oxide powder containing unavoidable impurities to FePt-based alloy powder containing Pt in an amount of 40 at % or more and less than 60 at % and one or more kinds of metal elements other than Fe and Pt in an amount of more than 0 at % and 20 at % or less with the balance being Fe and unavoidable impurities and with a total amount of Pt and the one or more kinds of metal elements being 60 at % or less so that the metal oxide powder accounts for 20 vol % or more and 40 vol % or less of a total amount of the FePt-based alloy powder and the metal oxide powder, followed by mixing the FePt-based alloy powder and the metal oxide powder to produce a powder mixture.
A process for producing an FePt-based sputtering target, comprising:
A process for producing an FePt-based sputtering target, comprising:
Dependencies are inferred from the claim text.