Process for producing FePt-based sputtering target
AssigneeTanaka Kikinzoku Kogyo K.K.
InventorsTakanobu Miyashita, Yasuyuki Goto, Takamichi Yamamoto, Ryousuke Kushibiki, Masahiro Aono, Masahiro Nishiura
Life of this patent
Estimating the term…
Loading patent…
AssigneeTanaka Kikinzoku Kogyo K.K.
InventorsTakanobu Miyashita, Yasuyuki Goto, Takamichi Yamamoto, Ryousuke Kushibiki, Masahiro Aono, Masahiro Nishiura
Estimating the term…
A process for producing an FePt-based sputtering target includes adding C powder containing unavoidable impurities and metal oxide powder containing unavoidable impurities to FePt-based alloy powder containing Pt in an amount of 40 at % or more and 60 at % or less with the balance being Fe and unavoidable impurities so that the C powder and the metal oxide powder are contained to satisfy: 0<α≦20; 10≦β<40; and 20≦α+β≦40, where α and β represent contents of the C powder and the metal oxide powder by vol %, respectively, based on a total amount of the FePt-based alloy powder, the C powder, and the metal oxide powder, followed by mixing the FePt-based alloy powder, the C powder, and the metal oxide powder to produce a powder mixture.
A process for producing an FePt-based sputtering target, comprising:
Dependencies are inferred from the claim text.