Arc management with voltage reversal and improved recovery
AssigneeAdvanced Energy Industries, Inc.
InventorsHendrik Walde, Joshua Brian Pankratz, David Christie, Brian D. Kowal
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AssigneeAdvanced Energy Industries, Inc.
InventorsHendrik Walde, Joshua Brian Pankratz, David Christie, Brian D. Kowal
Estimating the term…
Systems and methods for arc handling in plasma processing operations are disclosed. The method includes providing current with a power supply to a plasma load at a first voltage polarity and energizing an energy storage device so when it is energized, the energy storage device applies a reverse polarity voltage that has a magnitude that is as least as great as the first voltage polarity. When an arc is detected, power is applied from the energy storage device to the plasma load with a reverse polarity voltage that has a polarity that is opposite of the first voltage polarity, the application of the reverse polarity voltage to the plasma load decreases a level of the current that is provided to the plasma load.
An apparatus for arc handling, comprising:
Dependencies are inferred from the claim text.