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US 9,312,791 B2Granted
Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generating apparatus
AssigneeSeiko Epson Corporation
InventorKazuya Kitada
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Abstract
A piezoelectric element includes: a first electrode; a piezoelectric body layer which is provided on the first electrode; and a second electrode which is provided on the piezoelectric body layer, the piezoelectric body layer is made of a composite oxide with a perovskite structure, which contains bismuth, barium, iron, titanium, and strontium, and the content of strontium with respect to barium is equal to or greater than 5 mol % and equal to or less than 18 mol %.
Claims6
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric body layer provided on the first electrode, the piezoelectric body layer made of a composite oxide with a perovskite structure having a general formula of ABO3, wherein the complex oxide contains bismuth, barium, iron, titanium, and strontium, the content of strontium with respect to barium is equal to or greater than 8.70 mol % and equal to or less than 13.63 mol %, and the strontium is located at the A site of the ABO3 formula;
- and
- a second electrode provided on the piezoelectric body layer.
1 more element
Dependencies are inferred from the claim text.