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US 9,312,789 B2Granted
Vibrator, oscillator, electronic device, and moving object
AssigneeSeiko Epson Corporation
InventorRyuji Kihara
Life of this patent
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Abstract
A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extend in directions different from each other from the base portion. The MEMS vibrator has a curved surface between the adjacent vibration portions.
Claims6
A vibrator, comprising:
- a substrate;
- a base portion which is disposed on the substrate;
- a plurality of vibration portions which extend in directions different from each other from the base portion;
- and
- a plurality of lower electrodes disposed on a surface of the substrate opposite the vibration portions and overlapped with the plurality of vibration portions and base portion in a plan view,
- wherein the lower electrodes excite the vibration portions, and
- wherein a curved surface is provided between the adjacent vibration portions.
4 more elements
Dependencies are inferred from the claim text.