Method of manufacturing mask substrate and method of manufacturing organic electroluminescent display using the same
AssigneeSamsung Display Co., Ltd.
InventorsHyo Yeon Kim, Ha-Jin Song, Sang-Woo Lee, Hye-Yeon Shim, Heun-Seung Lee, Kyul Han, Sang-Woo Pyo
Life of this patent
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Abstract
A first conductive member is positioned on a base substrate. A second conductive member is positioned on the first conductive member, the second conductive member being electrically coupled to the first conductive member, and having a resistivity higher than that of the first conductive member. A mask substrate is positioned on the second conductive member. A portion of the mask substrate that contacts the second conductive member is removed.
Claims16
A method of manufacturing a mask substrate, comprising:
- positioning a first conductive member on a base substrate;
- positioning a second conductive member on the first conductive member, the second conductive member being electrically coupled to the first conductive member, and having a resistivity higher than that of the first conductive member;
- positioning a mask substrate on the second conductive member;
- burning a portion of the mask substrate that contacts the second conductive member to remove the portion of the mask substrate and form a mask hole;
- and
- removing the base substrate, the first conductive member, and the second conductive member from the mask substrate after burning the portion of the mask substrate,
- wherein the mask hole is configured to control the deposition of an organic material through the mask hole onto an array substrate,
- wherein the mask substrate is formed of a material different from the organic material that is deposited onto the array substrate, and
- wherein burning the portion of the mask substrate comprises transmitting a current to the second conductive member through the first conductive member to generate heat from the second conductive member.
A method of manufacturing an organic electroluminescent display, comprising:
- positioning a first conductive member on a base substrate;
- positioning a second conductive member on the first conductive member, the second conductive member being electrically coupled to the first conductive member, and having a resistivity higher than that of the first conductive member;
- positioning a mask substrate on the second conductive member;
- burning a portion of the mask substrate that contacts the second conductive member to remove the portion of the mask substrate and form a mask hole by transmitting a current to the second conductive member through the first conductive member to generate heat from the second conductive member;
- positioning an array substrate on the mask substrate;
- removing the base substrate and the first and second conductive members from the array substrate and the mask substrate to expose a portion of the array substrate through the mask hole;
- and
- forming an organic light emitting layer on the exposed portion of the array substrate by depositing an organic material through the mask hole onto the array substrate,
- wherein the mask substrate is formed of a material different from the organic material that is deposited onto the array substrate.
Dependencies are inferred from the claim text.