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US 9,312,488 B2Granted
Method for manufacturing organic electroluminescent element with bi-layer cathode
AssigneeJoled Inc.
InventorsMasaki Aonuma, Takuya Satoh, Akira Takiguchi, Yoichiro Yashiro
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Abstract
A method of forming an upper electrode in an organic electroluminescent element is provided. A first film made of a material for the upper electrode is formed on an organic functional layer by magnetron sputtering under a first condition. Thereafter, a second film made of the material for the upper electrode is formed on the first film by magnetron sputtering under a second condition different from the first condition. The second film has a lower film stress than the first film.
Claims6
A method for manufacturing an organic electroluminescent element that includes:
- an electrode pair composed of an upper electrode and a lower electrode;
- and an organic functional layer disposed between the upper electrode and the lower electrode, the method comprising:
- forming the upper electrode on the organic functional layer by magnetron sputtering, wherein
- the forming of the upper electrode includes:
- forming a first thin film made of a material for the upper electrode on the organic functional layer under a first condition;
- and
- forming a second thin film made of the material for the upper electrode on the first thin film under a second condition different from the first condition, the second thin film having a lower film stress than the first thin film.
4 more elements
Dependencies are inferred from the claim text.