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US 9,312,476 B2Granted
Magnetic memory
AssigneeKabushiki Kaisha Toshiba
InventorYoshinori Kumura
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a magnetic memory is disclosed. The magnetic memory includes a substrate, and a contact plug provided on the substrate. The contact plug includes a first contact plug, and a second contact plug provided on the first contact plug and having a smaller diameter than that of the first contact plug. The magnetic memory further includes a magnetoresistive element provided on the second contact plug. The diameter of the second contact plug is smaller than that of the magnetoresistive element.
Claims7
A magnetic memory comprising:
- a substrate;
- a contact plug provided on the substrate, the contact plug including a first contact plug, and a second contact plug provided on the first contact plug, wherein the second contact plug comprises a material different from a material of the first contact plug;
- a magnetoresistive element provided on the contact plug,
- a first insulating film covering a side surface of the first contact plug;
- a second insulating film covering a side surface of the second contact plug and an entire upper surface of the first insulating film, wherein the second insulating film comprises a material different from a material of the first insulating film,
- wherein the first contact plug, the second contact plug, and the magnetoresistive element satisfy relationships L1>L2 and L2<L3,
- where L1, L2 and L3 are respectively lateral dimensions of the first contact plug, the second contact plug, and the magnetoresistive element, in a cross section parallel to a stacked direction of the first contact plug, the second contact plug, and the magnetoresistive element.
4 more elements
Dependencies are inferred from the claim text.