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US 9,312,470 B2Granted
Method of manufacturing an ultrasonic transducer electrode assembly
AssigneeVolcano Corporation
InventorsCheryl Rice, Dongjuan Chris Xi
Life of this patent
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Abstract
A method of fabricating an ultrasound transducer includes providing a substrate having a first side and a second side opposite the first side. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.
Claims9
A method of fabricating an ultrasound transducer, the method comprising:
- providing a substrate having a first side and a second side opposite the first side;
- forming a bottom electrode over the first side of the substrate;
- forming a piezoelectric element over the bottom electrode, the piezoelectric element having a chamfered sidewall;
- forming a top electrode over the piezoelectric element;
- and
- forming a step metal element over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element such that the step metal element is in contact with segments of the top electrode spaced from one another.
3 more elements
Dependencies are inferred from the claim text.